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Rajagopal Reddy, V.,Sri Silpa, D.,Yun, H.J.,Choi, C.J. Academic Press 2014 Superlattices and microstructures Vol.71 No.-
The electrical and structural properties of a fabricated W/p-InP Schottky barrier diode (SBD) have been investigated as a function of annealing temperature. The W/p-InP SBD exhibits good rectification behavior. The barrier height (BH) and ideality factor of the W/p-InP SBD are determined to be 0.82eV (I-V)/0.98eV (C-V) and 1.34, respectively. However, the BH is increases to 0.87eV (I-V)/1.08eV (C-V) after annealing at 300<SUP>o</SUP>C. When the SBD is annealed at 400<SUP>o</SUP>C, the BH decreases to 0.74eV (I-V)/0.86eV (C-V) and the ideality factor increases to 1.45. Results indicate that a maximum BH is obtained on the W/p-InP SBD at 300<SUP>o</SUP>C. Norde method is also employed to determine BHs of W/p-InP SBD which are in good agreement with those estimated by the I-V method. Further, Cheung method is used to estimate the series resistance of the W/p-InP SBD, and the consistency is checked using the Norde method. Besides, the energy distribution of interface state density is determined from the forward bias I-V data at different annealing temperatures. Auger electron spectroscopy and X-ray diffraction studies revealed that the formation of W-P interfacial phases at the W/p-InP interface may be the cause for the increase of BH upon annealing at 300<SUP>o</SUP>C. AFM results indicated that the overall surface morphology of the W/p-InP SBD did not change significantly at elevated temperatures.
V. Rajagopal Reddy,D. Sri Silpa,V. Janardhanam,윤형중,최철종 대한금속·재료학회 2015 ELECTRONIC MATERIALS LETTERS Vol.11 No.1
The electrical, structural and surface morphological properties of Yb/p-InPSchottky barrier diode (SBD) have been investigated at different annealingtemperatures. The determined Schottky barrier height (SBH) and idealityfactor n of the as-deposited Yb/p-InP SBD are 0.68 eV (I-V)/0.81 eV(C-V)and 1.44 respectively. After annealing at 300°C, the SBH of Yb/p-InP SBDincreases to 0.72 eV (I-V)/0.88 eV (C-V). When the contact is annealed at400°C, the SBH slightly decreases to 0.67 eV (I-V)/0.80 eV (C-V). Theseresults reveal that the optimum annealing temperature for Yb/p-InP SBD is300°C. Cheung’s functions are also employed to determine the seriesresistance of the Yb/p-InP SBD. Using Terman’s method, the interface statedensity is estimated for Yb/p-InP SBD at different annealing temperatures. The XPS results reveal that the existence of phosphorous-rich surface afterthe annealing. The AES and XRD results showed that the formation ofphosphide phases at the Yb/p-InP interface may be the reason for theincrease of SBH after annealing at 300°C. The decrease in the BH afterannealing at 400°C may be due to the formation of indium phases at theinterface. The overall surface morphology of the Yb Schottky contact isfairly smooth at elevated temperatures.