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Maryam Mohri,Mohammed Renda Chellali,Di Wang,Julia Ivanisenko 대한금속·재료학회 2022 METALS AND MATERIALS International Vol.28 No.7
High entropy alloy thin films have been gained attention recently due to their exceptional properties like high corrosion resistance,unique mechanical and physical properties. In this research, DC magnetron sputtering was used to fabricate two kindsof high entropy alloys thin films of Ti–Zr–Pd–Cu and Ti–Zr–Pd–Cu–Bi at two working pressure 2 and 5 mTorr. Structural,thermal, and mechanical properties of the Ti–Zr–Pd–Cu and Ti–Zr–Pd–Cu–Bi thin films deposited at room temperature usingDC magnetron sputtering have been considered in this research. The microstructural analyses using X-ray diffractometer,scanning, and transmission electron microscopies show that the size of glassy clusters and the chemical composition of thinfilms can be controlled by adjusting the sputtering pressure. The high entropy alloy thin films deposited at high pressuredisplayed nano-clusters with an amorphous structure. The elemental distribution obtained using atom probe tomographyillustrated that Bi atoms were segregated along with the columnar interfaces. Furthermore, Bi addition to the Ti–Zr–Pd–Cuthin film led to increase in thermal stability and decrease in the characteristic enthalpy of the nanoglass thin films. The thinfilms’ mechanical properties were evaluated by nano-indentation. The results indicated that the Ti–Zr–Pd–Cu–Bi nanoglassthin film had higher strength, hardness, and elastic modulus than the Ti–Zr–Cu–Pd thin film. It was suggested that latticedistortion and nano columnar structure caused to increase in the mechanical properties of Ti–Zr–Pd–Cu–Bi thin film.