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Deepak Marla,Suhas Sitaram Joshi,Vishal Barde 한국정밀공학회 2013 International Journal of Precision Engineering and Vol. No.
An analytical model to predict the temperature distribution and ablation depth in excimer laser ablation process by solving onedimensional heat conduction equation has been proposed. The model takes into account aspects like temperature dependent thermal properties for polycarbonate material and re-solidification during pulse off-time. The effects of fluence and number of pulses with and without consideration to the temperature dependent thermal conductivity and pulse delay have been investigated. It is observed that consideration to temperature dependent thermal conductivity and re-solidification during pulse ‘off-time’ results in an appreciable improvement in the accuracy of ablation depth prediction and the error being within ± 0.8 μm.