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      • Dry etching characteristics of magnetic films and magnetic tunnel junctions using carbon, hydrogen and oxygen containing gas mixtures

        Adrian Adalberto Garay Dixon 인하대학교 대학원 2016 국내석사

        RANK : 247359

        The purpose of this study is to investigate the inductively coupled plasma reactive ion etching characteristics of magnetic thin films and magnetic tunnel junction (MTJ) stacks in carbon, hydrogen and oxygen containing gas mixtures. Spin transfer torque random access memory (STT-MRAM) has been spotlighted as an alternative memory device that will be available in the near future owing to its attractive advantages when compared to conventional memory devices. The etching of MTJ stacks magnetic layers is one of the most critical processes due to the poor reactivity of the magnetic materials and magnetization loss after etching owing to redeposition and severe etch damage. CoFeB and Co2MnSi films are magnetic materials used in the fabrication of the (STT-MRAM) MTJ stacks; thus, an extensive research on their etch properties is required. In order to explore and improve the etching characteristics of the magnetic layer and ultimately of MTJ stacks, as well as to investigate the etch mechanism of gases containing C, H and O, we introduced a new CH3COOH/Ar gas mixture. In this study, the ICPRIE of Co2MnSi and CoFeB thin films using a CH3OH/Ar and CH3COOH/Ar gas mixture, respectively, was conducted by varying CH3OH or CH3COOH concentrations in the CH3OH/CH3COOH/Ar gas mixture. Additionally, the etching of MTJ stacks in a CH3COOH/Ar gas mixture were investigated as a function of gas mixture concentration and etch time. In the case of Co2MnSi magnetic films etching, as the CH3OH concentration increased, the etch rates of Co2MnSi magnetic thin films and TiN hard mask decreased, but the etch profile improved. The etch rate and degree of anisotropy of etch profile increased with increasing rf power and dc-bias voltage and decreasing gas pressure. Optical emission spectroscopy analysis revealed that [H], [O], [CO], [OH], [CH3O] and [Ar] species in the CH3OH/Ar plasma played a key role in achieving a good etch profile. Secondly, for the etching of CoFeB magnetic films, as CH3COOH concentration mixture increased, the etch rates of CoFeB films and degree of anisotropy in the etch profile decreased, while increased coil rf-power and dc bias voltage and reduced gas pressure increased the etch rate and improved the etch profile. Additionally, a thick hydrocarbon layer was formed on the film surface at a dc-bias voltage of 100 V. X-ray photoelectron spectroscopy and optical emission spectroscopy analyses of the etched films at various CH3COOH concentrations suggest that CoFeB thin films etched in a CH3COOH/Ar gas mixture follow a physical sputtering etch mechanism assisted by oxidation of the film and formation of a protective inhibition layer on the film surface. Finally, when MTJ stacks were etched in a CH3COOH /Ar gas mixture high degree of anisotropy in the etch profile and fast etch rates were achieved. When etched in 25% CH3COOH for 3 min, a stack: space ratio of 1:1 was obtained and EDS analysis showed no significant redeposition along the sidewall. A high degree of anisotropy was accomplished without redepositions or etch residues.

      • NON-PERIODIC LATTICE STRUCTURE DESIGN FOR ADDITIVE MANUFACTURING

        Adrian Matias Chung Baek Graduate School of UNIST 2020 국내석사

        RANK : 247359

        As manufacturability of lattice structures has been relaxed with the availability of additive manufacturing (AM) technology, the study of cellular structure optimization has seen a rapid development during the past decade. Numerous design approaches for lattice structures have been proposed to help designers fabricate efficient lattice model. Generally, these approaches demand for unbearable computational cost and prior knowledge. To overcome the drawbacks of existing methods, Choi et al. proposes a simple framework of generating non-periodic lattice structures using topologically pre-optimized building blocks. However, this method does not properly consider the manufacturability of the lattice structure by neglecting additive manufacturing constraints in the design process. This thesis suggests a strategy to consider manufacturing constraints for the AM process in a contemporary lattice structure generation framework, in this case, Choi et al. work. The proposed method is devised to take full advantage of the already existing components, i.e. building block library, in order not to add complexity in the overall process. Considering the manufacturability of the lattice designs, an algorithm derived from the STL slicing method is introduced in the selection process to replace unprintable building blocks for optimal microstructure. Finally, numerical examples are presented, and reasonable solutions have been obtained to show the feasibility of the proposed method.

      • Effect of reinforcing materials on the flexural strength of repaired denture base

        Adrian carlos francisco manaloto 고려대학교 임상치의학대학원 2014 국내석사

        RANK : 247359

        Objective: The aim of this study was to analyze the effect of reinforcing materials on the flexural strength of denture resin. Materials and Methods: Ninety specimens by Rapid Simplified heat-polymerizing acrylic bars were fabricated using a stainless steel mold. Eight from the 9 groups (each group n=10) were modified by creating a channel to accommodate reinforcing materials. Fiber Force® Mesh Grill and Fiber Force® UD Fiber, aluminum mesh was chosen as metal reinforcing material. A gap in the longitudinal center of each bar was made to facilitate direct repair using Rapid Simplified self-curing resin, and indirect repair using Rapid Simplified heat-curing resin. Specimens were subjected to three-point bending test using universal testing machine with 100-kgf load cell engaged in the center of the specimen with 5-0mm/min cross-head speed. Scanning electron microscopy was used to analyze the specimens’ matrix interface with repair resin. Statistical analysis of the data was done using two-way ANOVA, and one-way ANOVA with Scheffe post hoc for multiple comparison (p <0.05). Result: The Fiber Reinforced Composite groups significantly improved the flexural strength. UD Fiber groups showed the highest flexural strength, succeeded by Mesh fiber groups, unreinforced groups, and aluminum mesh groups both direct and indirect repair groups. Indirect repair groups showed higher flexural strength compared with direct repair groups. There was no significant difference of the flexural strength among the direct repair group. Conclusion: The use of indirect repair with UD fibers may restore the flexural strength of dentures. This may also serve as a choice whether to repair the denture or to replace and construct a new prosthesis for the patient. 목적: 레진 의치의 굴곡 강도에 대한 강화 재료의 효과를 분석하려 한다. 재료와 방법: 스테인레스 스틸 몰드를 사용하여 제작된 Rapid Simplified heat-polymerizing acrylic bars 90개의 표본을 제작하고, 10개씩 총9개의군으로 나누었다. 8개의 군은 실험군으로서 재료를 삽입하기 위한 음각을 형성 하였으며, 이 중2개의 군에는 특별한 처치를 하지 않았고, 남은 6개의 군에 3개의 강화 재료Fiber Force® Mesh Grill 과 Fiber Force® UD Fiber, 알루미늄망을 각각 2개 군의 음각에 삽입 하였다. 실험군의 절반은 Rapid Simplified self-curing resin을 사용하여 직접수리(direct repair)을 하였고, 나머지 절반은 Rapid Simplified heat-curing resin을 사용하여 간접수리(indirect repair)를 시행하였다.수리를 마친 표본에 대해 만능시험기를 이용하여 100-kgf의 하중과5-0mm/min의 cross-head speed로 3점굴곡물성실험을 행하였고, 이를 통해 각 표본들의 강도를 측정하였다. 또한 강도 측정 후 각 표본의 표면을 전자 주사현미경을 이용하여 관찰하였다. Two-way ANOVA후 다중비교법인 Scheffe 검증(p <0.05)을 이용하여 결과를 통계적으로 분석하였다. 결과: 대체로 Fiber Force® Mesh Grill 과 Fiber Force® UD Fiber를 사용한 실험군에서 높은 굴곡 강도가 측정되었다. 특히 Fiber Force® UD fiber 군은다른 Mesh fiber 군, unreinforced 군과 aluminum mesh 군에비교하여직접수리군, 간접수리군모두가장높은굴곡강도를보였다.모든 간접수리를 행한 실험군은 직접수리를 행한 실험군과 비교하여 높은 굴곡강도를 보였다.직접수리를 행한 경우 강화 재료에 따른 굴곡 강도에 유의한 차이가 없었다. 결론: UD fiber를 사용한 간접 수리는 의치의 굴곡 강도를 향상 시킬 수 있다고 분석되며,이는 의치의 수리가 필요한 환자의 부담을 줄여줄 것이다.

      • (A) Comparative Research on Air Transportation Development in the Philippines and Malaysia

        Adrian Tugade 서울대학교 대학원 2018 국내석사

        RANK : 247359

        The aim of this thesis is to conduct a comparative analysis of the air transportation industries in the Philippines and Malaysia. Through this approach, recommendation on development strategies can be put forward to the Philippines. The research is based on the two facets of Air Transportation: (1) Infrastructure to be determined through evaluation of the core-factors of airport competitiveness, and (2) Air Service Liberalization, by application of the quantitative air services agreement review designed by the WTO. The result show that Malaysian privatization of the managing bodies of its Airports and a less bureaucratic division of air industry actors has led to more efficient and competitive airports, unlike the state owned and operated Airports of the Philippines. The study also found a positive and significant correlation between Philippines bilateral air service agreements, and contracting states openness to foreign ownership and legal origins. Malaysia on the other hand mostly focuses on partners with equally liberalized skies, particularly within its close regional proximity. 이 논문의 목적은 필리핀과 말레이시아의 항공산업의 비교분석이다. 비교 결과 필리핀의 개발 전략에 대한 몇가지 정책 권장사항이 도출되었다. 이 연구는 항공 산업의 두가지 측면을 염두에 두고 진행되었다. 첫번째로는 공항의 경쟁력을 중점으로 한 인프라스트럭쳐의 구성과 두번째로는 WTO가 디자인한 양적 항공 서비스 약정을 적용한 항공 서비스 자유화이다. 연구결과 공항 경영의 민영화를 실시한 말레이시아의 항공산업은 덜 관료적인 산업의 형태를 띠게 되었으며 국영 산업인 필리핀의 공항들보다 공항의 효율성과 경쟁력을 높인 것으로 나타났다. 또한 필리핀의 양자 항공 서비스 협약과 협정이 맺어진 국가들의 해외 투자에 대해 열려있는 정도와 법 체계 사이에 의미있는 연관성을 도출하였다. 한편 말레이시아의 경우 지리적으로 가깝고 자유화 된 영공을 가지고 있는 국가들과 파트너쉽을 가지는 경향이 있는 것으로 나타났다.

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