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빔 쉐이핑을 이용한 펨토초 레이저 ITO 박막 가공 깊이 제어에 대한 연구
김훈영,윤지욱,최원석,황경현,조성학,Kim, Hoon-Young,Yoon, Ji-Wook,Choi, Won-Seok,Stolberg, Klaus,Whang, Kyoung-Hyun,Cho, Sung-Hak 한국레이저가공학회 2014 한국레이저가공학회지 Vol.17 No.1
Indium tin oxide (ITO) is an important transparent conducting oxide (TCO). ITO films have been widely used as transparent electrodes in optoelectronic devices such as organic light-emitting devices (OLED) because of their high electrical conductivity and high transmission in the visible wavelength. Finding ways to control ITO micromachining depth is important role in the fabrication and assembly of display field. This study presented the depth control of ITO patterns on glass substrate using a femtosecond laser and slit. In the proposed approach, a gaussian beam was transformed into a quasi-flat top beam by slit. In addition, pattern of square type shaped by slit were fabricated on the surfaces of ITO films using femtosecond laser pulse irradiation, under 1030nm, single pulse. Using femtosecond laser and slit, we selectively controlled forming depth and removed the ITO thin films with thickness 145nm on glass substrates. In particular, we studied the effect of pulse number on the ablation of ITO. Clean removal of the ITO layer was observed when the 6 pulse number at $2.8TW/cm^2$. Furthermore, the morphologies and fabricated depth were characterized using a optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS).
극초단 펄스 레이저를 사용한 유리 내부의 필라멘테이션에 대한 실험적 연구
최원석,윤지욱,김주한,최지연,장원석,김재구,최두선,황경현,조성학,Choi, Won-Suk,Yoon, Ji-Wook,Kim, Joohan,Choi, Jiyeon,Chang, Won-Seok,Kim, Jae-Goo,Choi, Doo-Sun,Whang, Kyoung Hyun,Cho, Sung-Hak 한국레이저가공학회 2013 한국레이저가공학회지 Vol.16 No.1
We have successfully formed filament inside of a transparent soda-lime glass using a Ti:sapphire based femtosecond laser. To make filament form, keeping the laser intensity higher than critical intensity is essential. Also each of the machining parameters plays an important role for the formation of filament. In this paper, we study what parameter can possibly influence for formation of filament, and we introduce an application using filamentation by femtosecond laser for transparent material.
펨토초 레이저 기반 투명유리(BK7) 내부의 컬러 미세형상 가공
김훈영(Hoon-Young Kim),윤지욱(Ji-Wook Yoon),최원석(Won-Seok Choi),박정규(Jung-Kyu Park),최지연(Jiyeon Choi),김재구(Jae-Goo Kim),황경현(Kyoung Hyun Whang),조성학(Sung-Hak Cho) 한국레이저가공학회 2012 한국레이저가공학회지 Vol.15 No.3
We have successfully formed brown colored patterns inside of a transparent borosilicate glass generally known as BK7, laying the focus of near infrared Ti: sapphire femtosecond laser beam in the bulk BK7 glass. It is important to keep the laser power well below the damage threshold of BK7 in forming the color center. According to the low laser power, there was no laser induced mechanical damage such as cracks or threads in the color formed area. From the absorbance spectrum and its gaussian fitting, we found the band gap of BK7, 4.21eV, and three absorption edges.