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FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구
조경원,홍태환,권순용,최시경,Cho Kyoung-Won,Hong Tae-Whan,Kweon Soon-Yong,Choi Si-Kyong 한국재료학회 2004 한국재료학회지 Vol.14 No.10
The capacitor contact barrier(CCB) layers have been introduced in the FeRAM integration to prevent the Pt/Al reaction during the back-end processes. Therefore, the interdiffusion and intermetallic formation in $Pt(1500{\AA})/Al(3000{\AA})$ film stacks were investigated over the annealing temperature range of $100\sim500^{\circ}C$. The interdiffusion in Pt/Al interface started at $300^{\circ}C$ and the stack was completlely intermixed after annealing over $400^{\circ}C$ in nitrogen ambient for 1 hour. Both XRD and SBM analyses revealed that the Pt/Al interdiffusion formed a single phase of $RtAl_2$ intermetallic compound. On the other hand, in the presence of TiN($1000{\AA}$) barrier layer at the Pt/Al interface, the intermetallic formation was completely suppressed even after the annealing at $500^{\circ}C$. These were in good agreement with the predicted effect of the TiN diffusion barrier layer. But the conventional TiN CCB layer could not perfectly block the Pt/Al reaction during the back-end processes of the FeRAM integration with the maximum annealing temperature of $420^{\circ}C$. The difference in the TiN barrier properties could be explained by the voids generated on the Pt electrode surface during the integration. The voids were acted as the starting point of the Pt/Al reaction in real FeRAM structure.
Mg<sub>8</sub>Ti<sub>2-</sub>(10, 20 wt.%)Ni 수소저장합금의 제조 및 수소화 특성 평가
김경일,홍태환,Kim, Kyeong-Il,Hong, Tae-Whan 한국재료학회 2010 한국재료학회지 Vol.20 No.10
The hydrogen energy had recognized clean and high efficiency energy source. The research field of hydrogen energy was production, storage, application and transport. The commercial storage method was using high pressure tanks but it was not safety. However metal hydride was very safety due to high chemical stability. Mg and Mg alloys are attractive as hydrogen storage materials because of their lightweight and high absorption capacity (about 7.6 wt%). Their range of applications could be further extended if their hydrogenation properties and degradation behavior could be improved. The main emphasis of this study was to find an economical manufacturing method for Mg-Ti-Ni-H systems, and to investigate their hydrogenation properties. In order to examine their hydrogenation behavior, a Sievert's type automatic pressure-compositionisotherm (PCI) apparatus was used and experiments were performed at 423, 473, 523, 573, 623 and 673 K. The results of the thermogravimetric analysis (TGA) revealed that the absorbed hydrogen contents were around 2.5wt.% for (Mg8Ti2)-10 wt.%Ni. With an increasing Ni content, the absorbed hydrogen content decreased to 1.7 wt%, whereas the dehydriding starting temperatures were lowered by some 70-100 K. The results of PCI on (Mg8Ti2)-20 wt.%Ni showed that its hydrogen capacity was around 5.5 wt% and its reversible capacity and plateau pressure were also excellent at 623 K and 673 K.
임샛별,유희정,홍태환,정미원,Lim, Saet-Byeol,You, Hee-Jung,Hong, Tae-Whan,Jung, Mie-Won 한국재료학회 2010 한국재료학회지 Vol.20 No.9
$Al_2O_3$ has received wide attention with established use as a catalyst and growing application in structural or functional ceramic materials. On the other hand, the boehmite (AlO(OH)) obtained by sol-gel process has exhibited a decrease in surface area during phase transformation due to a decline in surface active site at high temperature. In this work, $Al_2O_3$-CuO/ZnO (ACZ) and $Al_2O_3$-CuO/CeO (ACC) composite materials were synthesized with aluminum isopropoxide, copper (II) nitrate hemi (pentahydrate), and cerium (III) nitrate hexahydrate or zinc (II) nitrate hexahydrate. Moreover, the Span 80 as the template block copolymer was added to the ACZ/ACC composition to make nano size particles and to keep increasing the surface area. The ACZ/ACC synthesized powders were characterized by Thermogravimetry-Differential Thermal analysis (TG/DTA), X-ray Diffractometer (XRD), Field-Emmision Scanning Electron Microscope (FE-SEM), Bruner-Emmett-Teller (BET) surface analysis and thermal electrical conductivity (ZEM-2:M8/L). An enhancement of surface area with the addition to Span 80 surfactant was observed in the ACZ powders from 105 $m^2$/g to 142 $m^2$/g, and the ACC powders from 103 $m^2$/g to 140 $m^2$/g, respectively.
이상점성 처리된 Mg-3, 6wt%Ni합긍의 수소화 특성평가
이성곤,하원,홍태환,김영직,Lee, Sung-Gon,Ha, Won,Hong, Tae-Whan,Kim, Young-Jig 한국재료학회 2002 한국재료학회지 Vol.12 No.12
Magnesium-3, 6wt% Nickel alloys were fabricated by Rotation-Cylinder Method(RCM) in ambient atmosphere. The alloys were divided into two different heat-treating conditions, as-cast and thixotropic treated. Thixotropic heat treatment enhances the separation of primary hydride former of Mg and the catalytic phase of $Mg_2$Ni. Hydrogenation properties of the each alloy were evaluated and compared by PCI(Pressure-Composition Isotherm) measurement. The maximum hydrogen capacity and the reversible capacity of as -cast Mg-6wt% Ni alloy were 5.2wt% and 3.8wt% at 623k, respectively.
다이렉트 프린팅용 청정 금속 및 세라믹 나노 입자 잉크 기술 동향
홍성제,김종웅,한철종,김용성,홍태환,Hong, Sung-Jei,Kim, Jong-Woong,Han, Chul-Jong,Kim, Young-Sung,Hong, Tae-Whan 한국마이크로전자및패키징학회 2010 마이크로전자 및 패키징학회지 Vol.17 No.2
본고에서는 청정 공정을 이용한 다이렉트 프린팅용 금속 및 세라믹 나노 입자 및 잉크 소재의 국내외 기술 동향 및 시장 전망에 대해 고찰하였다. 다이렉트 프린팅용 나노 입자 기술은 해외의 경우 UILVAC에서 연구 개발이 활발하게 진행되고 있는데, 주로 가스중 증발법에 의해 진행되고 있었다. 또한, 국내의 경우 전자부품연구원 등 산학연에서 활발하게 진행되고 있고, 가스중 증발법 및 저온 합성법 등 건식과 습식법에 의해 진행되고 있었다. 또한 이러한 금속 및 세라믹 나노 분말 입자를 이용하여 잉크를 제조하고 이를 다이렉트 프린팅 공정에 적용하여 박막 및 패턴을 제작하는 연구도 진행되고 있었다. 이러한 다이렉트 프린팅용 나노 입자 및 잉크는 전기, 전자, 정보, 통신 산업의 핵심 소재로서 관련 산업 및 시장이 빠른 속도로 증가하고 있다. 이러한 청정 공정 기술은 연구개발 단계에 있어 국내에서도 청정 기술을 이용하여 선진 기술에 접근하고 있는 결과가 제시되고 있다. 이와 같이 다이렉트 프린팅용 금속 및 세라믹 나노 입자 및 잉크의 기술에 있어서 세계적인 기술의 주도를 위해선 나노 입자 및 잉크의 청정 제조의 원천 기술 개발을 통한 기술 확보 및 시장의 경쟁을 통한 우위 점유가 필요하다. In this paper, trends on technology of metal and ceramic nanoparticle inks using eco-friendly process were reviewed. There are two types of eco-friendly processes, dry and wet. In case of dry process, gas evaporation process was being used to synthesize the ultrafine nanoparticles. Also, in case of wet process, low temperature process excluding harmful elements such as $Cl^-$ and ${NO_3}^-$ was being used to synthesize the ultrafine nanoparticles. Sizes of nanoparticles were less than 10 nm using the eco-friendly processes, and the nanoparticles were well dispersed into ink solvent. The ink was successfully applied to fabricate directly printed pattern.