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강유전체 Pb(Zr_0.5₂ Ti_0.₄8)O₃박막의 성장 및 물리적 성질
표윤숙,김두회,이장기,김상수 昌原大學校 基礎科學硏究所 2000 基礎科學硏究所論文集 Vol.12 No.-
Ferroelectric Pb(Zr0.52Ti0.48)O3(PZT) thin films coated on Si(100), SiO2/Si(100), Pt/Ti/SiO2/Si(100) and ITO/glass substrates were perpared by sol-gel processing of metal alkoxide solutions and solvents. The XRD investigation shows that the tetragonal phase of polycrystalline PZT was formed by more than four times coating of the concentrated solution and by the heat treatment over 600℃. It was found by SEM that the thin film had an average thickness of about 900Å/coating and surfaces were crack-free and uniform. Capacitance and dielectric loss (tan δ) of PZT thin film were amounted to 0~30nF and 0.05∼20 in the region of 1 kHz ∼ 10 MHz respectively. From the hysteresis loops of PZT/Pt/Ti/SiO2/Si(100) and PZT/ITO/glass thin films, a remnant polarization of 0.2573 μC/cm2, 0.1873 μC/cm2 and a coercive field of 27.78 kV/cm, 24.44 kV/cm were obtained respectively. The band gap energy, refractive index, and extinction coefficient at λ =6235Å of the PZT thin films were 3.74 eV, 1.81 and 0.048 respectively.
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sol-gel법을 이용한 ?? 강유전체 박막의 성장과 특성
표윤숙,이장기,김상수 昌原大學校 基礎科學硏究所 1999 基礎科學硏究所論文集 Vol.11 No.-
We have developed a simple and rapid method for the synthesis of a precursor solution used in the production of ?? thin films of the layered-perovskite phase ??. Precursor solution preparation takes less than 30 min and involves the generation of two solutions : (a) Bi(O₂CMe)₃dissolved in pyridine and (b) ?? added to Sr(O₂CMe)₂and than solutbilized by HO₂CMe. After stirring separately for 10 min, these solutions are combined, stirred for an additional 10 min, and used without any further modifications. Films of the layered-perovskite phase were formed at temperatures as low as 700℃. Ferroelectric testing of SBN films, films, fired at 800℃ reveals standard hysteresis loop with no fatigue for up to 4×10 cycles.
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