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사각뿔 형태의 Mass 보상된 실리콘 압저항형 가속도 센서
손병복,이재곤,최시영 ( Byoung Bok Sohn,Jae Gon Lee,Sie Young Choi ) 한국센서학회 1994 센서학회지 Vol.3 No.1
When etching rectangular convex corners of silicon using anisotropic etchants such as KOH, deformation of the edges always occurs due to undercutting. Therefore, it is necessary to correct the mass pattern for compensation. Experiments for the compensation method to prevent this phenomenon were carried out. In the result, the compensation pattern of a regular square is suitable for acceleration sensors considering space. With this consequence, silicon piezoresistive acceleration sensor with compensated square pillar type of mass has been fabricated using SDB wafer.