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광자기 디스크의 기록특성에 SiN 하지층이 미치는 영향
최건(G. Choe) 한국자기학회 1992 韓國磁氣學會誌 Vol.2 No.1
Effect of SiN underlayer on the recording characteristics of magneto-optical disk was investigated. Magneto-optical media were fabricated by dc magnetron sputtering of a four-layer structure on polycarbonate disks. The microstructure of SiN underlayer played an important role in determining the domain wall motion of magnetic layer, independent of the film composition of magnetic layer.<br/> The SiN thin films sputtered at high pressure exhibited columnar structure with low density and inhibited a domain wall movement at columnar boundaries. As SiN underlayer became porous, the switching field distribution of magneto-optical disks became non-uniform with degrading squareness. In addition, the write power threshold of dynamic disk testing was low and domain nucleation was observed at low external bias field. In order to enhance the external bias field sensitivity of magneto-optical disks, a dense and smooth SiN underlayer need to be deposited.
광자기 디스크의 기록 및 자기적 특성에 산소가 미치는 영향
최건(G. Choe) 한국자기학회 1993 韓國磁氣學會誌 Vol.3 No.3
The effects of differential partial pressures of oxygen during sputtering on the magnetic and recording characteristics of magneto-optical disks were investigated. Different flows of oxygen were deliberately introduced into the sputtering chamber to have a variety of partial pressures of oxygen during sputtering. A residual gas analyzer was employed to monitor the oxygen peak before, during, and after sputtering and to estimate the reacted oxygen amount. Most of the oxygen introduced into the chamaber was reacted during sputtering. As the partial pressure of oxygen increased, the oxygen content of the TbFeCoCr film increased also. The oxygen appeared to be bound as Tb-O, effectively decreasing the magnetically active Tb content of the film. The coercivity decreased but the squareness of the Kerr hysteresis loops was still excellent. The perpendicular anisotropy was not significantly affected by oxygen amount. The carrier-to-noise ratio, including the write power sensitivity and bias field sensitivity did not change too much with oxygen content in the film. The disks sputtered with oxygen showed better bias field sensitivity with lower write power threshold than the disk sputtered without oxygen, due to high demagnetization during domain formation. No significant degradation of coercivity for the disk sputtered oxygen was observed during an accelerated aging test.