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권태종,채호철,한창수,정진태,안강호 韓國工作機械學會 2000 한국생산제조학회지 Vol.9 No.6
Spinning mechanism is generally used in coating process on grass plates. Rebounding PR(Photo Resist) which leads to occur inferiority of coating process is caused by vibrational energy of whole coating system. In this study, the sensitivity analysis is performed to analyze and reduce vibrational terns in the spin coating system. The sensitivity analysis is bared on the numerical expression of this system. By the bond graph method, power flow of each system is represented by some basic bond graph elements. Any energy domain system is modeled using the unified elements. The modelled spin coater system is verified with power spectrum data measured by FFT analyzer. As the results of verifying model parameters and sensitivity analysis, principal factors causing vibration phenomenon are mentioned. A study on vibration reduction method in the spin coating system is discussed.