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- 저자 : 지원호(W.H. Jee) (검색결과 4 건)
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윤승원(S. W. Youn),지원호(W. H. Jee),우종혁(J. H. Woo) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
An experimental and numerical approach has been carried out for to see the noise characteristics of a circular diamond saw. The noise level measurement result for the several kinds of shanks shows us that the noise level reduction in high frequency range could be an effective way to control the noise problem. Sandwich type shank whose center part is laminated with a low Young’s modulus material greatly reduces the noise level. The noise level for the shank where several curve shaped slits are provided in the circumferential direction is reduced considerably too. The response spectrum analysis by the FEM shows us to be an alternative for predicting the noise characteristics of the shank.
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송준엽(J.Y. Song),강재훈(J.H. Kang),이창우(C.W. Lee),하태호(T.H. Ha),지원호(W.H. Jee),김원경(W.K. Kim) 한국정밀공학회 2005 한국정밀공학회 학술발표대회 논문집 Vol.2005 No.10월
In this study, 6” GaAs wafer bonding system is designed and optimized to bond 6 inches device wafer and material wafer. Bonding process is performed in vacuum environment and resin is used to bond two wafers. Vacuum module and double heating mechanisms are adopted to minimize wafer warpage and void. Structure and heat transfer analysis, et al of the core modules review the designed mechanisms are very effective in performance improvement. As a result, high productivity (tack time cut-down) and stabilized process can be obtained by reducing breakage failure of wafer.
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CMP 패드 컨디셔너의 제조공법에 따른 패드 컨디셔닝 특성
강승구(S. K. Kang),송민석(M. S. Song),지원호(W. H. Jee) 한국정밀공학회 2005 한국정밀공학회 학술발표대회 논문집 Vol.2005 No.10월
Currently Chemical Mechanical Planarization (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. Especially the CMP pad conditioner, one of the diamond tools, is required to have strong diamond retention. Strong cohesion between diamond grits and metal matrix prevents macro scratch on the wafer. If diamond retention is weak, the diamond will be pulled out of metal matrix. The pulled diamond grits are causative of macro scratch on wafer during CMP process. Firstly, some results will be reported of cohesion between diamond grits and metal matrix on the diamond tools prepared by three different manufacturing methods. A measuring instrument with sharp cemented carbide connected with a push-pull gauge was manufactured to measure the cohesion between diamond grits and metal matrix. The retention force of brazed diamond tool was stronger than the others. The retention force was also increased in proportion to the contact area of diamond grits and metal matrix. The brazed diamond tool has a strong chemical combination of the interlayer composed of chrome in metal matrix and carbon which enhance the interfacial cohesion strength between diamond grits and metal matrix. Secondly, we measured real-time data of the coefficient of friction and the pad wear rate by using CMP tester (CETR, CP-4). CMP pad conditioner samples were manufactured by brazed, electro-plated and sintered methods. The coefficient of friction and the pad wear rate were shown differently according to the arranged diamond patterns. Consequently, the coefficient of friction is increased according as the space between diamonds is increased or the concentration of diamonds is decreased. The pad wear rate is increased according as the degree of diamond protrusion is increased.
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이종원(C.W.Lee),지원호(W.H.Jee),김철순(C.S.Kim),문영수(Y.S.Mun),김영대(Y.D.Kim) 한국자동차공학회 1992 한국자동차공학회 춘 추계 학술대회 논문집 Vol.- No.-
In this work, three algorithms combined with two frequency response<br/> function (FRF) estimation methods are proposed for the purpose of regeneration of field <br/> data for six degrees of freedom vehicle motion simulators. Then the algorithms are <br/> tested and the rates of convergence are investigated through simulations with mathematical<br/> nonlinear models and laboratory experiments. The performances of each algorithm are <br/> evaluated based on the variance calculated from the error between the given field data and <br/> the regenerated data in the frequency domain. Extensive simulation and experimental works <br/> suggest that the algorithm, which uses the inverse FRF estimation method and takes into <br/> account the inherent system nonlinearity. reveals the best and satisfactory performance in <br/> the regeneration of field data for the laboratory vehicle motion simulator.<br/>
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