http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
권성원 ( Sung Won Kwon ),박세일 ( S . I . Park ),조용명 ( Y . M . Cho ),강전홍 ( J . H . Kang ) 한국센서학회 1996 센서학회지 Vol.5 No.4
Planar multi-junction thermal converters were fabricated for precise measurements of the ac voltage and current by an ac-do transfer method. A heater and a thermocouple array were fabricated onto a sandwiched membrane, Si₃N₄ (200 nm) / SiO₂(400 nm) / Si₃N₄(200 nm, a thickness of 0.8 ㎛ and a size of 2 x 4 ㎟, which is supported by a surrounding frame. The NiCr heater is located at the center of the membrane vertically. Hot junctions of 48 ∼ 156 pairs of thermocouples (Cu-CuNi44) are located near or onto the heater, and cold junctions are located onto the silicon frame. Output of the thermal converters for 10 mA do input was 76 mV ∼ 382 mV dependent on a model, and short term stability of the outputs was ±5 ∼ 15 ppm/ 10 min with 5 mA do input. Responsivity in air was in the range of 3.9 ∼ 14.5 V/W. Responsivity of the model BF48 in air which has 48 thermocouples was 2 times or greater than that of 3 dimensional multi-junction thermal converter in vacuum which has 56 thermocouples. AC-DC transfer differences with an input of 10 mA or less were less than ±1 ppm in the frequency range from 5 Hz to 2 kHz, and about 2 ∼ 3 ppm at 5 kHz and 10 kHz.