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- 저자 : 정훈모(Hoon-Mo Jung) (검색결과 1 건)
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바이오센서용 3가지 나선형 코일과 이중구조 GMR-SV 소자 제작과 특성 연구
최종구(Jong-Gu Choi),정훈모(Hoon-Mo Jung),이상석(Sang-Suk Lee) 한국자기학회 2017 韓國磁氣學會誌 Vol.27 No.6
We fabricated the GMR-SV device composed of three helical coils, for application as biosensors using by lithography. Ar-ion milling, and lift-off processes. Three different helical coils of Cu films were placed on the center of the GMR-SV with a width of 2 ㎛. A SiO₂ film of 100 nm thick was deposited as a insulating layer so that the center of the lower helical coil layer and the upper layer of coil electrode was separated. When the same dc current of 10 mA was applied to the coils of 2 turn, 3 turn, and 4 turn, the maximum magnetic flux density values at the center z = 0, which is perpendicular to the coil plane, were 1820 μT, 2400 μT and 3090 μT, respectively. The magnetoresistance ratio of the GMR-SV device measured with two terminals was 2.08 %, but it had almost linear hysteresis property and the average magnetic field sensitivity was 0.2%/Oe or less. When multiple magnetic beads adsorbed on the surface of red blood cells pass through a 8 ㎛ width of PR channel, the currents induced to the respective coils of three multi-turns are generated as an enough magnetic field to capture those. After stopping the red blood cells, there is a possibility that the output signal value of the GMR-SV device as bisosenor can be detected.
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