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박흥우(Heung Woo Park),주병권(Byeong Kwon Ju),이원희(Yun Hi Lee),박정호(Jung Ho Park),오명환(Myung Hwan Oh) 한국센서학회 2000 센서학회지 Vol.9 No.3
N/A A micro-vacuum sensor was fabricated for the measurement of the vacuum level in micro-space. The fact that the field emission current was dependent on the environmental vacuum level was employed as an operating principle. 1`he fabricated lateral-type field emitter triode with a cathode, a gate and a anode separated by using the surface micromachining process showed the emission current variation in the range of 1.20∼2.42 μA for the vacuum range of 10^(-5)∼10^(-8) Torr.