http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Micro-Machining을 이용한 SPM(Scanning Probe Microscope)용 실리콘 Probe의 제조
이동발,이정희,함성호,이종현 경북대학교 센서기술연구소 1997 센서技術學術大會論文集 Vol.8 No.1
Scanning probe tip, integrated on the silicon cantilever, is fabricated by means of micro-machining technique. This technique utilizes a combination of dry and wet etching and oxidation sharpening to form very sharp tip which is suitable for SPM. The mechanical requirements for proper operation of probe, such as resonant frequency and force constant are simulated using finite element method. Several types of the probe having different geometrical shape are fabricated. Typical dimensions of cantilver are 150 ~ 190 μm in length, 20 ~ 40 μm in width, and 2 ~ 4 μm in thickness. Typical values of tip height and radius of the tip end are larger than 5 μm and less than 100nm, respectively. Simulated results show that high resonant frequency of approximately 140 kHz and force constant near 2 ~ 5 N/m, which can be applied to tapping and non-contact mode operation of SPM.