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스퍼터링 압력이 Co / Pd 다층박막의 자화반전 및 수직자기 이방성에 미치는 영향
오훈상(Hoon-Sang Oh),주승기(Seung-Ki Joo) 한국자기학회 1994 韓國磁氣學會誌 Vol.4 No.3
200Å thick Co /Pd multilayered thin films were fabricated by sputtering. Two thicknesses of cobalt sublayer, 2Å and 4Å were chosen and the effects of sputtering pressure on the perpendicular magnetic anisotropy were investigated.<br/> It has been found that the optimum pressure for maximum perpendicular magnetic anisotropy (PMA) existed and the pressure for maximum PMA was lower for the multilayer with 2Å cobalt layer than that with 4Å cobalt thickness. As the sputtering gas presssure increased, domain wall motion with magnetization became difficult and the predominant mode of magnetization reversal changed from domain wall motion to magnetic moment rotation.<br/> It turned out that the perpendicular magnetic anisotropy was higher in case of 2Å cobalt thickness than 4Å cobalt thickness.