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양현모,정병묵,고태조,이천,박종권 한국공작기계학회 2009 한국공작기계학회 춘계학술대회논문집 Vol.2009 No.-
High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the machining experiments, the single stage has an machining error of 2 micron, while the dual stage has only 0.3 micron error. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.