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권영락,심태언 외 1인 空軍士官學校 1983 論文集 Vol.16 No.-
Two dimensional Numerical model of ion-implanted MOSFET is presented, The fundamental semiconductor equations are solved with proper calculation method to all very quick converging of results. We also fabricate some Ion Implanted MOSFET's for checking the model's accuracy. A good agreement between model and experiment was reported.