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NiFe/Cu/NiFe/IrMn 스핀밸브 박막소자의 자화 용이축에 따른 형상 자기이방성
최종구(Jong-Gu Choi),곽태준(Tae-Joon Kwak),이상석(Sang-Suk Lee),심정택(Jung-Taek Sim) 한국자기학회 2010 韓國磁氣學會誌 Vol.20 No.2
The GMR-SV (giant magnetoresistance-spin valve) device depending on the micro patterned features according to two easy directions of longitudinal and transversal axes has been studied. The GMR-SV multilayer structure was Ta(5 ㎚)/NiFe(8 ㎚)/Cu(2.3 ㎚)/NiFe(4 ㎚)/IrMn(8 ㎚)/Ta(2.5 ㎚). The applied anisotropy direction of the GMR-SV thin film was performed under the magnitude of 300 Oe using by permanent magnet during the deposition. The size of micro patterned device was a 1 × 18 ㎛² after the photo lithography process. In the aspects of the shape magnetic anisotropy effect, there are two conditions of fabrication for GMR-SV device. Firstly, the direction of sensing current was perpendicular to the magnetic easy axis of the pinned NiFe/IrMn bilayer with the transversal direction of device. Secondly, the direction of shape magnetic anisotropy was same to the magnetic easy axis of the free NiFe layer with the longitudinal direction of device.