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직류 마그네트론 스퍼터링으로 형성한 Co - Pt 합금박막의 수직자화기구에 대한 연구
박성언(Sung-Eon Park),김기범(Ki-Bum Kim) 한국자기학회 1994 韓國磁氣學會誌 Vol.4 No.3
We have produced Co_(1-x)Pt_x(x = 0.53 and 0.75) alloy films by DC magnetron sputtering at various substrate temperatures and sputtering pressures. Sputter-deposited Co-Pt alloy films showed a strong (111) texture, and the degree of (111) texture of the as-deposited film was found to depend on the substrate temperature and Ar pressure. However, we observed that the degree of (111) texture did not affect the magnetic properties. In addition, we have investigated the effect of heat-treatment on magnetic properties of these films. While the magnetic properties of the Co_(0.25)Pt_(0.75) alloy films showed no noticeable changes, the coercivities and the squarenesses of the Co_(0.47)Pt_(0.53) alloy films were drastically increased by annealing. Structural analysis using transmission electron microscopy(TEM) and x-ray diffractometry(XRD) revealed that CoPt(L1_0) and CoPt₃(L1₂) ordered phases, respectively, were formed, each with a strong (111) texture. By comparing the magnetic properties between CoPt(L1_0) and CoPt₃(L1₂) ordered phases in relation to the atomic arrangements in a unit cell, we conclude that the magnetic anisotropy in the Co-Pt alloy system depends mainly on the atomic arrangements of Co and Pt.