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나노계면 형성을 위한 초음파 진동자 위치보정을 위한 레이저 스캐닝 기술
김경한(Kyugnhan Kim),이제훈(Jaehoon Lee),김현세(Hyunse Kim),박종권(Jongkweon Park),윤광호(Kwangho Yoon) Korean Society for Precision Engineering 2014 한국정밀공학회지 Vol.31 No.12
To compensate location error of ultrasonic horn, the laser scanning system based on the galvanometer scanner is developed. It consists of the 3-Axis linear stage and the 2-Axis galvanometer scanner. To measure surface shape of three-dimensional free form surface, the dynamic focusing unit is adopted, which can maintain consistent focal plane. With combining the linear stage and the galvanometer scanner, the scanning area is enlarged. The scanning CAD system is developed by stage motion teaching and NURBS method. The laser scanning system is tested by marking experiment with the semi-cylindrical sample. Scanning accuracy is investigated by measured laser marked line width with various scanning speed.