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홍석관(Seok Kwan Hong),권순철(Soon Cheol Kweon),전병희(Byung Hee Jeon),신형재(Hyung Jae Shin) Korean Society for Precision Engineering 2006 한국정밀공학회지 Vol.23 No.8
By removing sacrificial layer through ashing process, movable MEMS structure on substrate can be fabricated in surface micro machining. However, MEMS structure includes, during the ashing process, the warping or buckling effects due to stress gradient along the vertical direction of thin film. In this study, we presented method for counteracting the unwanted deflection of MEMS structure and designed using character of deposit process to overcome limited design conditions. Unit cell patterns were designed with character of deposit shape, and their final shapes were adopted using Finite Element Method. Finally, RF MEMS switch was fabricated by surface micro machining as test vehicles. We checked out that alleviation effect for deformation of switch improved by 35%.