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Study of A MEMS Gyroscope Sensing Unit Simulate and Process
Yu Liu,Baisheng Sun,Ping Yue,Qinwen Yan,Fuxue Zhang 제어로봇시스템학회 2010 제어로봇시스템학회 국제학술대회 논문집 Vol.2010 No.10
This paper reports a MEMS gyroscope that is driven by the rotating carrier’s angular velocity. The structure and fabrication are introduced in the paper. The silicon processing and simulating of the sensing unit are studied. We use coventor ware to simulate structure. And in process, we use spray coating instead of spinning coating. In simulation, the first modal frequency we obtained is 220.38Hz, it is nearly we calculated. A conformal resist of 3μm thickness is obtained at 35mm Z-height, 100mm/min travel rate, 3ml/min flow rate. In step surface coating it gets more uniform thickness that associates with line width, a better line width would get a more precise pattern. Thus, it provides an opportunity of a precision patterning on a wafer.
( Xiaofeng Liao ),( Jingzhong Chen ),( Ruiting Guan ),( Jiming Liu ),( Qinwen Sun ) 한국균학회 2021 Mycobiology Vol.49 No.4
Cinnamomum migao plants often face different degrees of drought in karst habitats, which can lead to plants’ death, especially in the seedling stage. Widespread of arbuscular mycorrhizal (AM) fungi in karst soils have the potential to address this drought, which is a threat to C. migao seedlings. We inoculated C. migao seedlings with spores from Glomus lamellosum and Glomus etunicatum, two AM fungi widely distributed in karst soils, to observe seedling growth response after simulated drought. Our results showed that 40 g of G. lamellosum and G. etunicatum significantly promoted the growth of C. migao seedlings, 120 days after inoculation. Following a 15-day drought treatment, root colonization of the seedlings with G. lamellosum or G. etunicatum had lower the accumulation of malondialdehyde (MDA) and increased the accumulation of enzymes and osmotic substances in the seedlings. The relative water content in different organs (roots, stems, and leaves) of the drought-stressed seedlings was higher in plants with G. lamellosum or G. etunicatum than in plants without AM fungi colonization. Our results showed that inoculation with AM fungi was an effective means to improve the drought resistance of C. migao seedlings.