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김재형(Kim Jae-Hyung),김희동(Kim Heuy-Dong),Tochiaki Setoguchi 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
Recently, it is required to accurately measure the very small mass flow rate in industry fields such as MEMS applications. Especially, the critical nozzle is being used as a precise measurement and control device of gas flow. In present study, a computational fluid dynamics method has been applied to investigate the influence of diffuser angle on discharge coefficient in critical nozzle. In computations, the diffuser angle of a critical nozzle, which a throat diameter from 0.2 ㎜ to 5.0 ㎜ is varied from 2 degree to 8degree. The computational results are validated with some experimental data available. The results show that the present computational results predict reasonably the discharge coefficient and when the nozzle throat diameter becomes small below a certain value, the discharge coefficient is influenced by the diffuser angle.