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$C_{x}F_{y}$ Polymer Film Deposition in rf and dc $C_{7}F_{16}$ Vapor Plasmas
Sakai, Y.,Akazawa, M.,Sakai, Yosuke,Sugawara, H.,Tabata, M.,Lungu, C.P.,Lungu, A.M. The Korean Institute of Electrical and Electronic 2001 Transactions on Electrical and Electronic Material Vol.2 No.1
$C_{x}F_{y}$ polymer film was deposited in rf and dc Fluorinert vapor ($C_{7}F_{16}$) plasmas. In the plasma phase, the spatial distribution of optical emission spectra and the temporal concentration of decomposed species were monitored, and kinetics of the $C_{7}F_{16}$ decomposition process was discussed. Deposition of $C_{x}F_{y}$ film has been tried on substrates of stainless steel, glass, molybdenum and silicon wafers at room temperature in the vapor pressures of 40 and 100 Pa. The films deposited in the rf plasma showed excellent electrical properties as an insulator for multi-layered interconnection of deep-submicron LSI, i.e. the low dielectric constant ∼2.0, the dielectric strength ∼2 MV/cm and the high deposition rate ∼100nm/min at 100W input power.
An Experimental Analysis and Expertise for a Fish-Drying Process Control
Y.Sakai,M.Nakamura,T.Shiragami,M.K?chi 대한전자공학회 1992 대한전자공학회 학술대회 Vol.1992 No.10
Analysis is made for a fish-drying process control in order to implement a human expertize into an automated fish drying system. Together with the idea described in the companion paper, a methodology is found effective in a general drying system other than fish drying.
POLYMERIC MATERIALS USABLE FOR GAS SENSORS
Sakai, Y. 한국재료학회 1995 Fabrication and Characterization of Advanced Mater Vol.1 No.3
Various types of sensors to monitor humidity and gases were prepared using organic polymers. In order to prepare resistive type humidity sensors which can be used at high humidities, several methods of cross-linking of hydrophilic polymer chains were proposed, while in order to prepare capacitive humidity sensors durable in organic solvent vapors, utilization of cross-linked hydrophobic polymers were proposed. In addition, for a resistive type $CO_2$ sensors, solid polyethylene glycol containing alkali carbonate can be used. Polymers which have dimethyl amino branch can be used for the sorbing layer in a QCM type sensor. These polymers are alos applicable to the fabrication of both resistive and QCM type acetic acid vapor sensor. Polypyrrole and polyaniline can be used to detect $NH_3$gas.
Modeling and Parameter Estimation of a Fish-Drying Control System
Y.Sakai,K.Wada,H.Nakamura 대한전자공학회 1992 대한전자공학회 학술대회 Vol.1992 No.10
The major purpose here is to estimate the drying time required in the fish-drying process employed. The basic element of the prediction of the drying time is the model or the equation, which governs the change in weight. By an intuitive consideration on the mechanism of dehydration, a mathematical model of the fish-drying process is built, which is described by a system of linear differential equations. Further, a modified system of linear differential equations for a model of drying is also proposed for more accurate estimation. The parameter estimation of this system of equations provides the prediction of necessary drying time.
Personal Computer Networking for Concept Understanding
Y.Sakai,M.Kitazawa 대한전자공학회 1992 대한전자공학회 학술대회 Vol.1992 No.10
This paper deals with the architecture of an information processing model for the human concept understanding required in constructing intelligent man-machine interfaces. The architecture employed is a parallel processing by networking. For this purpose, personal computers are interconnected by LAN and are, in their roles, divided into three levels. A concept has two aspects; i.e., language and image. In the present model, the system as the holistic whole of personal computers together with peripheral devices processes visual information in cognitive level, searching for feasible solutions from a variety of aspects. An image inputted through peripheral systems is categorized and matched with those ever experienced with the aid of that categorization, and thus an image is identified.