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R.F Sputtering 법으로 증착한 ITO 박막의 미세구조와 전기ㆍ광학적 특성
전영희(Y.H. Jung),이은수(E.S. Lee),B. Munir,R.A. Wibowo,김규호(K.H. Kim) 한국표면공학회 2005 한국표면공학회지 Vol.38 No.4
Highly conductive and transparent in the visible region tin-doped indium oxide(ITO) thin films were deposited on Corning glass by r.f sputtering. To achieve high transmittance and low resistivity, we examined various parameters such as r.f power and deposition time. The films crystallinity shifted from (222) to (400) and (440) orientation as deposition time and r.f power increased. Surface roughness RMS value increased proportionally with deposition time. The lowest resistivity was 5.36 × 10<SUP>-4</SUP> Ωㆍ㎝ at 750 ㎚ thickness, 200℃ substrate temperature and 125 w r.f power. All of the films showed over 85% transmittance in the visible wavelength range.
DERMAWAN, B.,HUDA, I.N.,WIBOWO, R.W.,HIDAYAT, T.,UTAMA, J.A.,MANDEY, D.,TAMPUBOLON, I. The Korean Astronomical Society 2015 天文學論叢 Vol.30 No.2
This work considers the elliptic restricted three-body problem under effects of radiation of the bigger primary, and an oblate spheroid for the smaller primary to mimic an exoplanetary system with a gas giant planet. Under the influences of both effects we look for the existence of the triangular equilibrium points and the influences of the radiation and oblateness on the locations and motion of the points. We set the system in a normalized rotating coordinate system and derive equations of motion for the third infinitesimal object. Our study shows that the effects modify the equilateral/isosceles triangle shape with respect to the primaries. The triangular points also have non-planar motion with period depending on the value of the planet oblateness.