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- 저자 : Muraleedaran Nair (검색결과 1 건)
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Study on the Effects of H+ and He+ Implantation in Semi-Insulating GaAs by Using Raman Spectroscopy
santhakumar kannappan,Cheul-Ro LEE,Hayakawa Y,Jayavel P,Jin soo Kim,Kesavamoorthy R,Muraleedaran Nair,Tetsuo soga 한국물리학회 2007 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.51 No.2I
Fifty-keV hydrogen-ion (H$^+$) and 70-keV helium-ion (He$^+$) implantation with doses from 10$^{13}$ to 10$^{16}$ cm$^{-2}$ in semi-insulating (100) gallium-arsenide (GaAs) single- crystal substrates have been carried out. Raman spectra of as-grown, implanted, and post-implantation-annealed GaAs samples are analyzed. Two LO phonon modes have been observed for all the samples. The lower wavenumber peak is attributed to the strained surface layer whereas the higher wavenumber peak is due to bulk GaAs crystal. For H$^+$ implantation, the peak positions of both peaks shift towards lower wavenumber up to a dose of 10$^{14}$ cm$^{-2}$ due to passivation of charge carriers. For higher doses, the peak positions shift towards higher wavenumber due to hydrogen-filled vacancy loops. On the other hand, for He$^+$-implanted samples, the peak positions increase for doses up to 10$^{13}$ cm$^{-2}$ and then decrease at higher doses. The immiscible nature of helium at low doses causes the increase in the peak positions. In contrast, implantation-induced damage is dominant at higher doses. Implantation-induced defects are partially annealed by post-implantation annealing, causing a blueshift of the peak positions for the H$^+$-implanted samples. In He$^+$-implanted samples, the peak positions redshift due to annealing of He interstitials at low doses and blueshift due to annealing of implantation-induced defects at high doses.
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