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Dehghani Mehdi,Lee Hojun,Shahbazi Saeed,Kim Kyoung-Ho,Kang Evan S. Hyunkoo 한국물리학회 2022 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.81 No.7
We present a spray pyrolysis method that can form amorphous Al2O3 thin flms for dielectric applications using low-cost precursor materials. The efect of the precursor molar ratios on morphological and electrical properties of spray-coated Al2O3 thin flms was studied. For a low molar ratio of acetylacetone (AcAc) to Al ions (AcAc/Al), inhomogeneous morphology with the formation of large particles was observed. The increase in AcAc/Al improves the coverage of Al by AcAc molecules, which prevents the premature solidifcation of Al ions, resulting in compact flms with smooth surfaces. On the contrary, excessive AcAc for the high AcAc/Al leaves cracks in the flms due to the evaporation of AcAc during flm deposition. Electrical measurements on metal–insulator-metal (MIM) structures showed consistent results, and superior dielectric performance with sufciently low leakage current was observed for the optimized AcAc/Al values.