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Gasidit Panomsuwan,Nagahiro Saito,Osamu Takai 한국표면공학회 2010 한국표면공학회 학술발표회 초록집 Vol.2010 No.11
SrTiO₃ films have been grown by an ion beam deposition on LaAlO₃ substrate at different growth temperatures and oxygen partial pressures. The influences of these growth parameters on crystal structure and surface morphology were investigated by XRD and AFM, respectively. XRD results show that STO films exhibit a single perovskite phase with high (h00) orientation and epitaxial relationship was found to be STO (100) // LAO (100) and STO [100] // LAO [100]. Two-dimensional growth mechanism (step-flow growth mode) with small RMS roughness of ~0.1 nm can be observed at high growth temperature and optimum oxygen partial pressure as investigated by AFM images. Cross-sectional TEM observation was also carried out in order to investigate the interfacial structure.