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      • KCI등재후보

        Relaxation issues in nanoindentation experiments

        P.M. Nagy,P. Horvath,D. Aranyi,E. Kalman 한국물리학회 2006 Current Applied Physics Vol.6 No.2

        ples and antimony doped SnO2 thin lms (ATO) by depth sensing indentation (nanoindentation) experiment. The combination ofnanoindentation and atomic force microscopy provides a straightforward method to follow the indentation and relaxation processof the material, revealing not only the hardness and Young.s modulus of the sample, but also gaining information on the deforma-tion process taking place during the indentation. A method was worked out based on computer evaluation of AFM images of nano-pyramid. It provides a quantitative method to investigate the relaxation characteristic of dierent materials. Single grains incoarse-grained titanium and the ATO layers were investigated by this combined method, anisotropy and relaxation eects were stud-ied. The hardness and Young.s modulus of the ATO layers have been found to be dependent on the preparation method, but therelaxation of various layers are largely uniform. Dierent Ti grains, however, have uniform hardness and Young.s modulus, but the relaxation effects in these samples show orientation dependence.

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