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단의 수에 따른 원판형 드래그펌프의 성능에 대한 설험적 연구
권명근(Myoung-Keun Kwon),허중식(Joong-Slk Heo),황영규(Young-Kyu Hwang) 대한기계학회 2002 대한기계학회 춘추학술대회 Vol.2002 No.5
Experimental investigations are performed for the rarefied gas flows in a disk-type drag pump. The pump considered in the present study consists of grooved rotors and stators. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured under the outlet pressure range of 0.001~4 Torr. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region.