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단순직선 모서리형 툴의 수평 이송 기판 상 고주기 진동압입 기반 연속적 나노패턴 생산 시스템 개발
김지엽(Jiyeop Kim),이윤규(Youn Kyu Lee),지강민(Kang Min Jee),이승조(Seungjo Lee),문승규(Seung Kyu Moon),옥종걸(Jong G. Ok) 한국생산제조학회 2018 한국생산제조학회지 Vol.27 No.3
We developed a continuous nanopattern manufacturing system that realizes a high-frequency vibrational indentation of a simple flat-edge rigid tool onto a horizontal-feeding polymer substrate with computer-based control. We first designed a process principle and its implementation modules, and subsequently constructed a system prototype. By controlling the tool vibration frequency and indenting force as well as the substrate feeding speed and stroke direction, we can create diverse nanopatterns with various periods and shapes including periodtunable nanogratings and multidimensional nanostructures. Such manufactured nanopatterns may be utilized in many potential applications involving precision machinery components, displays and light sources, sensors and actuators, and flexible electronics and photonics, all of which require tunable periods and shapes.
롤투롤 나노임프린팅 및 금속 경사증착 기반 대면적 유연 기판 상 3D LSPR 구조의 연속적 제작 및 투명센서 소자 응용
위정섭(Jung-Sub Wi),오동교(Dong Kyo Oh),이성호(Sung Ho Lee),이승조(Seungjo Lee),이규태(Kyu-Tae Lee),김정대(Jeong Dae Kim),이재혁(Jae Hyuk Lee),안주현(Ju Hyun Ahn),이원석(Won Seok Lee),지강민(Kang Min Jee),박인규(Inkyu Park),곽문규(Moon 한국기계가공학회 2017 한국기계가공학회 춘추계학술대회 논문집 Vol.2017 No.4