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우대광(Daekwang Woo),남경탁(Kyungtag Nam),김영길(Younggil Kim),김광수(Kwangsu Kim),강윤호(Yunho Kang),김태성(Taesung Kim) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
The particle formation using pyrolysis has many advantages over other particle manufacturing techniques. The particles by pyrolysis have relatively uniform size and chemical composition. Also, we can easily produce high purity particles. Thus, we studied the formation of silicon particles by pyrolysis of 50% SiH₄ gas diluted in Ar gas. A pyrolysis furnace was used for the thermal decomposition of SiH4 gas at 800℃ and atmospheric pressure. The aerosol flow from furnace is separated into two ways. The one is to the Scanning Mobility Particle Sizer (SMPS) for particle size distribution measurement and the other is to the particle deposition system. The produced silicon particles are deposited on the wafer in the deposition chamber. SEM measurement was used to compare the particle size distribution results from the SMPS. Depending on the experimental conditions, particles of high concentration in the 30~80 ㎚ size range were generated.