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Inkjet Printing을 이용한 Polymer Film의 전극 Patterning에서의 나노 Composite의 분사에 관한 연구
황교일(Kyo-il Hwang),신창용(Chang-yong Sin),이정훈(Jung-Hoon Lee),류경주(Kyung-Joo Ryu),김훈모(Hunmo Kim),최혁렬(Hyoukryeol Choi),전재욱(Jae Wook Jeon),남재도(Jae-Do Nam) 대한기계학회 2002 대한기계학회 춘추학술대회 Vol.2002 No.5
To perform the Polymer MEMS, makig thin electrode and patterning of electrode that makes an active area of polymer are necessary. Because these operations are handled by investigator, there is no accuracy is needed. But actuators that are made by polymer MEMS is more smaller and need more accuracy, precise patterning and making thin electrode skills are necessary.<br/> So in this paper, the research that deposit the nano-sized electrode particle using inkjet print method for makig thin electrode and patterning of electrode