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2 차원 평판가공법을 이용한 고세장비 미세 격벽어레이구조물 가공
박언석(Eun-Suk Park),최환진(Hwan-Jin Choi),김한희(Han-Hee Kim),전은채(Eun-chae Jeon),제태진(Tae-Jin Je) Korean Society for Precision Engineering 2012 한국정밀공학회지 Vol.29 No.12
The micro barrier rip array structures have been applied in a variety of areas including as privacy films, micro heat sinks, touch panel and optical waveguide. The increased aspect ratio (AR) of barrier rip array structures is required in order to increase the efficiency and performance of these products. There are several problems such as burr, defect of surface roughness and deformation and breakage of barrier rip structure with machining high-aspect ratio micro barrier rip array structure using orthogonal cutting method. It is essential to develop technological methods to solve these problems. The optimum machining conditions for machining micro barrier rip array structures having high-aspect ratio were determined according to lengths (200 μm and 600 μm) and shape angles (2.89° and 0°) of diamond tool, overlapped cutting depths (5 μm and 10 μm), feed rates (100 mm/s) and three machining processes. Based on the optimum machining conditions, micro barrier rib array structures having aspect ratio 30 was machined in this study.
초소경 엔드밀링을 이용한 미세 가공특성 분석 및 응용가공
최환진(Hwan-Jin Choi),박언석(Eun-Suk Park),전은채(Eun-chae Jeon),제태진(Tae-Jin Je),최두선(Doo-Sun Choi) Korean Society for Precision Engineering 2012 한국정밀공학회지 Vol.29 No.12
Micro structures which are widely used at various fields are commonly fabricated by lithograph, etching and laser methods. Recently, with the emergence of micro tools and ultra-precision machine tools, fabrication of the micro structures obtained using end-milling are studied. However, there are some problems due to the diameter of the micro end-mill getting smaller below 100 μm. The micro run-out resulted from miniaturization of end-mills have influence seriously on accuracy of micro structures. The error of run-out with a tooling jig showed a decrease of about 9.3 μm. Furthermore, micro structures with width of 30 μm could be applied through experiments of slot machining obtained using 30 and 50 μm end-mill. Also, narrow angle structures with 30° angle could be applied through analysis of machining acute angle structures. Based on basic experiments, micro fluidics channels and spiral patterns for air bearing were machined.
제태진(Tae-Jin Je),최두선(Doo-Sun Choi),전은채(Eun-Chae Jeon),박언석(Eun-Suk Park),최환진(Hwan-Jin Choi) 한국기계가공학회 2012 한국기계가공학회지 Vol.11 No.2
Recent ultra-precision machining systems have nano-scale resolution, and can machine various shapes of complexstructures using five-axis driven modules. These systems are also multi-functional, which can perform various processes such as planing, milling, turning et al. in one system. Micro machining technology using these systems is being developed for machining fine patterns, hybrid patterns and high aspect-ratio patterns on large-area molds with high productivity. These technology is and will be applied continuously to the fields of optics, display, energy, bio, communications and et al. Domestic and foreign trends of micro machining technologies for flat molds were investigated in this study. Especially, we focused on the types and the characteristics of ultra-precision machining systems and application fields of micro patterns machined by the machining system.