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다양한 전기탐침을 이용한 RF 플라즈마 전자온도의 측정
서영준(Y.-J Seo),우현종(H.-J. Woo),최근식,유현종(H.-J. You),노태협(T. Lho),정규선(K.-S. Chung) 대한전기학회 2006 대한전기학회 학술대회 논문집 Vol.2006 No.7
An electric probe is a conductor inserted into the plasma, by which plasma density and electron temperature can be deduced from the collected current (Ⅰ) versus applied voltage (Ⅴ) to the probe. In RF plasma the Ⅰ-Ⅴ characteristics of electric probe is distorted due to the RF fluctuation of plasma potential, so that it is hard to measure the real plasma parameters, especially the electron temperature. To eliminate the RF fluctuation, several compensation methods are developed such as RF compensation probe, peak-to-peak method, asymmetric double probe. By comparing proposed methods, a suitable method is to be introduced in determining electron temperatures in RF plasma.