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정완영,임준우,이덕동,노보루야마조에 ( Wan Young Chung,Jun Woo Lim,Duk Dong Lee Noboru Yamazoe ) 한국센서학회 1998 센서학회지 Vol.7 No.2
The In₂O₃ thin films were fabricated on a alumina substrate by spin-coating method and the gas sensing properties were tested. The coating solution was synthesized by the mixing of aqueous solution of In(OH)₃ and acetic acid, and ammonium carboxymethyl cellulose as a binder. The In₂O₃ thin films between 71 and 210nm thick were obtained by spin-coating between 1 and 7 times followed by drying at 110 ℃ and calcining at 600 ℃. The films consisted of a dense stack of tiny In₂O₃ particles between 23 and 27nm in diameter and covered well large grains of the alumina substrate. Then film thickness was well controlled by the number of spin-coating. The fabricated In₂O₃ films showed high sensitivity and very fast response property to CO and Hz.
박막 형 가스 센서에 있어서 가스 감지 속도에 대한 막 두께의 영향
유도준,준 타마키,노리오 미우라,노보루 야마조에,박순자,Yu, Do-Joon,Jun Tamaki,Norio Miura,Noboru Yamazoe,Park, Soon-Ja 한국재료학회 1996 한국재료학회지 Vol.6 No.7
박막 형 가스 센서의 막 두께가 가스 감지 특성에 미치는 영향을 단순화된 모델로부터 수식으로 유도하여 해석하였고, 그것을 ${SnO}_{2}$와 CuO-${SnO}_{2}$ 박막의 ${H}_{2}S$ 감응 특성에 대한 실험 결과에 적용하였다. 유도된 수식으로부터 박막 가스 센서의 가스 감지 특성은 가스의 박막 안으로의 확산성에 크게 의존하며, 그 가스 확산성은 박막의 두께, 가스의 센서 재료의 반응성, 작동 온도 등에 의해서 결정됨을 알 수 있었다. 또한 이 수식은 CuO-${SnO}_{2}$ 박막의 ${H}_{2}S$ 감응 특성에 대한 실험 결과와 비교적 잘 일치하였고, CuO-${SnO}_{2}$ 박막과 ${SnO}_{2}$ 박막의 서로 판이한 ${H}_{2}S$ 감응 특성에 대한 설명에 적용되었다. 이로부터, 일반적인 산화물 반도체식 가스 센서의 가스 감지 특성이 가스 확산성에 의해서 어떻게 지배되는가를 구체적으로 제안하였다. Effect of Film thickness on the sensing behavior of thin-film-type ags sensor has been analyzed by deriving an equation form a simple model, and the equation was applied to the sensing behavior of ${SnO}_{2}$ and CuO-${SnO}_{2}$ thin-film sensors. It was revealed, from the equation,that the gas sensing property was closely related to gas diffusivity into the film which was a function of film thickness, reactivity of the gas detected with sensing material, operating temperature, etc. The equation derived was well consistent with the experimental results from ${SnO}_{2}$ and CuO-${SnO}_{2}$ thin-film sensors and explained their different ${H}_{2}S$ sensing behaviors. Finally, a medel was suggested, explainning the effect of gas diffusivity on sensing be havior of oxide semiconductor sensor.
마이트로 가스센서를 위한 저전력 마이크로 히터의 제조 1 . 유한요소법에 의한 열분포해석
이덕동 ( Duk Dong Lee ),정완영 ( Wan Young Chung ),임준우 ( Jun Woo Lim ),노보루야마조에 ( Noboru Yamazoe ) 한국센서학회 1997 센서학회지 Vol.6 No.4
The micro heater with PSG/Si₃N₄ diaphragm and platinum heater pattern was designed for micro-gas sensor fabrication. The platinum heater and the platinum electrode for sensing layer were designed on that same plane and fabricated in the single photolithography process. The thermal analyses including temperature distribution over the diaphragm and power consumption of the heater were carried by finite t m. The thermal properties of the microsensor with both heater and tensing electrode on the same plane was compared with that of the typical microsensor which had the structure of sensing layer/insulator/heater on the diaphragm.