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TiO<sub>2</sub> 박막 성장에 의한 광전기화학 물분해 효율 변화
김성규,조유진,진선화,서동혁,김우병,Seong Gyu Kim,Yu Jin Jo,Sunhwa Jin,Dong Hyeok Seo,Woo-Byoung Kim 한국재료학회 2024 한국재료학회지 Vol.34 No.4
In this study, we undertook detailed experiments to increase hydrogen production efficiency by optimizing the thickness of titanium dioxide (TiO<sub>2</sub>) thin films. TiO<sub>2</sub> films were deposited on p-type silicon (Si) wafers using atomic layer deposition (ALD) technology. The main goal was to identify the optimal thickness of TiO<sub>2</sub> film that would maximize hydrogen production efficiency while maintaining stable operating conditions. The photoelectrochemical (PEC) properties of the TiO<sub>2</sub> films of different thicknesses were evaluated using open circuit potential (OCP) and linear sweep voltammetry (LSV) analysis. These techniques play a pivotal role in evaluating the electrochemical behavior and photoactivity of semiconductor materials in PEC systems. Our results showed photovoltage tended to improve with increasing thickness of TiO<sub>2</sub> deposition. However, this improvement was observed to plateau and eventually decline when the thickness exceeded 1.5 nm, showing a correlation between charge transfer efficiency and tunneling. On the other hand, LSV analysis showed bare Si had the greatest efficiency, and that the deposition of TiO<sub>2</sub> caused a positive change in the formation of photovoltage, but was not optimal. We show that oxide tunneling-capable TiO<sub>2</sub> film thicknesses of 1~2 nm have the potential to improve the efficiency of PEC hydrogen production systems. This study not only reveals the complex relationship between film thickness and PEC performance, but also enabled greater efficiency and set a benchmark for future research aimed at developing sustainable hydrogen production technologies.