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Finding Ways to Deform Fine Patterns Fabricated by UV Curable Resin
김우영(Woo Young Kim),최수현(Su Hyun Choi),김선준(Seonjun Kim),조영태(Young Tae Cho) Korean Society for Precision Engineering 2020 한국정밀공학회지 Vol.37 No.4
In this study, experiments were performed to determine if the pattern fabricated by the UV nano imprint process could be modified using additional processes such as surface treatment. We wanted to confirm the fabrication possibility of a special pattern such as the reverse trapezoidal shape difficult to produce because of the releasing problem. The UV ozone treatment (Hydrophilic Treatment) and OTS coating (Water Repellent Treatment) were used and shape modification occurred under controlled treatment time. As a result of performing the UV ozone treatment for 30 minutes or more on a micro pattern manufactured by UV curing resin of PUA series, the contraction phenomenon of the micro structure occurred and the shrinkage was dependent on treatment time. When the OTS treatment was performed, the surface of the microscale pattern could be roughened. When the nanoscale pattern was treated, the pattern change could be induced. It was possible to partially cure the resin by adjusting the UV absorption using dye material, and the deformation of the pattern was made by an additional pressing process. As a result of the experiment of the various methods causing the shape change of the cured pattern, the possibility of the methods was verified.