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Probe Card Tip의 기계적 마모를 고려한 Polishing Sheet 특성 연구
표성준(Seongjun Pyo),강상부(Sang Boo kang),최봉준(BongJun Choi),황홍선(Hongsun Hwang) 대한전자공학회 2023 대한전자공학회 학술대회 Vol.2023 No.11
In this paper, the characteristics of the existing NPS (Needle Polishing Sheet) were studied to improve the long-term operation technology of the probe card. In order to consider the mechanical wear characteristics of the probe card tip, performance conditions for a new NPS with excellent heat resistance were presented and the new NPS was verified in a mass production environment. The change in tip shape due to the difference in surface hardness between the existing NPS and the new NPS was observed under high temperature conditions, and the SI quality improvement due to the maintenance of the tip cross-section was confirmed through durability evaluation and mass production test verification evaluation.