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https://www.riss.kr/link?id=O39961680
1996년
eng
1078-8743
SCOPUS
학술저널
IEEE SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP
364-369 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
0780333721; 0780333713; 078033373X
Annual advanced semiconductor manufacturing conference
7th
Cambridge; MA
1996; Nov
0
상세조회0
다운로드
30% Productivity increase of 16Mb-DRAM Gate-Conductor Etching Without Additional Investment
A Systematic Team Approach for Improving LPCVD Silicon Nitride Reactor Performance
Overall Equipment Effectiveness in Resist Processing Equipment
Equipment Characterization & Integration: Building a Foundation for Quality