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https://www.riss.kr/link?id=O40211255
1996년
eng
학술저널
MICRO SYSTEM TECHNOLOGIES
505-512 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
3800722003
Micro electro, opto, mechanical systems and components: Micro system technologies 96
International conference; 5th
Potsdam; Germany
1996; Sep
0
상세조회0
다운로드
Japanese Activities of Micromachines and its Future Prospects
Silicon micromachining technology for heated gas sensor elements
A Historical Perspective of Semiconductor Packaging Technologies and Markets
Microsystems for Automotive Application - Semiconductor Aspects