Transducers and their elements : design and application

목차 (Table of Contents)

• CONTENTS
• PREFACE = xi
• INTRODUCTION = xv
• CHAPTER 1 TRANSDUCER CHARACTERISTICS AND STRUCTURES = 1
• Measurands = 1
• Operating Principles = 5
• Design Characteristics = 7
• Performance Characteristics = 7
• Reliability Characteristics = 7
• Transducer Structure = 13
• CHAPTER 2 CONTACT, RESISTIVE, AND ELECTRODE ELEMENTS = 19
• Contact Elements = 19
• Junction Resistance Elements = 23
• Potentiometric Elements = 26
• Strain-gage Elements = 38
• Liquid Strain Gages = 39
• Plastic Strain Gages = 40
• Metal Strain Gages = 40
• Electrode Elements = 54
• Electrical Potentials and Conductivity of Solutions = 54
• Elements for the Measurement of Conductivity = 60
• Displacement-sensitive Elements with Electrodes = 65
• Resistive Elements for Hygrometry = 66
• Memistors = 67
• PH-sensitive Elements with Electrodes = 68
• ORP or Redox Elements = 71
• Oxygen-sensitive Elements = 72
• Polarographic Cells = 73
• Coulomb-meter Elements = 74
• Electrokinetic or Zeta Potential Elements = 77
• CHAPTER 3 CAPACITIVE AND INDUCTIVE ELEMENTS = 79
• Capacitive Elements = 79
• Structures of Capacitive Elements = 80
• Equivalent Circuits and General Characteristics = 82
• Single Displacement Elements = 85
• Differential Displacement Elements = 86
• Angle Displacement Elements = 87
• Film-thickness Elements = 88
• Large Displacements and Level Elements = 88
• Displacement-to-phase Converters = 91
• Pressure-sensitive Capacitive Elements = 93
• Other Elements = 102
• Electrostatic Forces and Nonlinear Dynamics = 105
• Attenuation of Sensitivity in a Microelectronic Capacitive Element = 108
• Temperature Instabilities = 109
• Features = 111
• Inductive Elements = 112
• Structures of Inductive Elements = 113
• Equivalent Circuits and General Characteristics = 113
• Single Displacement Elements = 121
• Differential Displacement Elements = 127
• Solenoid Elements = 128
• Coil-displacement Elements = 130
• Long-displacement Elements = 133
• Proximity Elements = 135
• Thickness-of-metal sensitive Elements = 137
• Magnetostrictive Elements = 140
• Other Elements = 151
• Electromagnetic Forces and Nonlinear Dynamics = 154
• Temperature Instabilities = 162
• Features = 164
• CHAPTER 4 TRANSFORMER, ELECTRODYNAMIC, SERVO, AND RESONANT ELEMENTS = 167
• Transformer Elements = 167
• Single-core Transformers = 167
• Differential Transformers = 169
• Rotating-coil Transformers = 169
• Synchro-transformers = 170
• Weak-field Sensors = 171
• Electrodynamic Elements = 173
• Moving-coil Elements = 174
• Variable-reluctance Elements = 175
• Electromagnetic Flowmeters = 176
• Nonelectrode Electromagnetic Flowmeters = 179
• Elements of Servo Transducers = 180
• Resonant Elements = 186
• Vibrating Strings = 187
• Vibrating Beams = 190
• Vibrating Capsules = 193
• Vibrating Cylinders = 199
• Piezoelectric Resonators = 202
• Acoustical Resonators = 208
• Microwave Cavity Resonators = 212
• Various Resonators = 212
• CHAPTER 5 MECHANICAL, ACOUSTICAL, AND FLOWMETERING ELEMENTS = 216
• Elastic Elements = 216
• Absolute Pressure Capsules = 229
• Capsule Structure = 229
• Capsule Material, Shape, and Size = 231
• Stressed State of Diaphragm = 232
• Capsule Transfer Characteristic = 235
• Dynamic Characteristics of the Diaphragm = 237
• Temperature Drifts = 238
• Sensitivity to Acceleration = 238
• Some Characteristics of Design = 239
• Inertial-mass Elements = 240
• Sensing and Transduction Elements of Flowmeters = 244
• Ultrasonic Elements = 255
• Acoustical Elements = 259
• Acoustical Filters = 264
• CHAPTER 6 HEAT-EXCHANGE ELEMENTS = 267
• Temperature-sensitive Elements = 267
• Hot-wire Elements = 274
• CHAPTER 7 CHARACTERISTICS OF SOLID-STATE TRANSDUCING DEVICES = 277
• Solids in Sensors = 278
• Electroconducitivity of Solids = 278
• Electrical Characteristics of Semiconductors = 280
• Semiconductor Junctions = 285
• Bipolar Transistors = 288
• Field-effect Transistors(FET's) = 291
• Metal-oxide-silicon FET's(MOSFET's) = 292
• Crystal Structures of Semiconductors = 295
• Mechanical Characteristics of Semiconductors = 297
• CHAPTER 8 FABRICATION OF MICROSENSORS = 307
• Basic Operations in Fabrication of Microsensors = 307
• Purification of Silicon = 308
• Growth of silicon Crystals = 308
• Ingot Slicing = 309
• Diffusion = 310
• Oxidation = 312
• Photolithographic Processes = 312
• Chemical-Vapor Deposition = 316
• Etching of Silicon = 319
• Metallization = 324
• Thermomigration = 327
• Wafer Probing = 327
• Die Separation = 327
• Die Attachment = 328
• Other Technologies = 332
• Fabrication of Pressure-sensitive Microstructures = 348
• Fabrication of Surface-sensitive Structures = 355
• CHAPTER 9 MICROMECHANICAL SENSING AND ACTUATING STRUCTURES = 357
• Electromechanical Microsensors = 357
• Surface Acoustical Wave(SAW) Microsensors = 357
• Resonant Microsensors = 363
• Microaccelerometers = 376
• Pressure Microsensors = 382
• Microactuators and Micromotors = 391
• Semiconductor Strain Gages = 393
• Strain-sensitive Junction Structures = 402
• Piezoelectric Elements = 404
• CHAPTER 10 TEMPERATURE-AND LIGHT-SENSITIVE MICROSTRUCTURES AND FIBER-OPTIC SENSORS = 416
• Solid-state Temperature Sensors = 416
• Thermistors = 416
• Silicon Resistive Temperature Sensors = 419
• Thermal Sensors Based on Transistors = 420
• Integrated Thermocouples = 422
• Other Temperature Sensors = 424
• Photodetectors = 426
• Thermal Detectors = 426
• Pneumatic Datectors = 428
• Pyroelectric Detectors = 428
• Photoemissive Devices = 429
• Photoconductive Detectors = 431
• Photodiodes = 434
• Avalanche Photodiodes = 439
• Schottky Photodiodes = 440
• Phototransistors = 440
• Charge-coupled Devices(CCD's) = 441
• Thin-film Diffraction-grating Radiation Detector = 441
• Pyrometer Sensor = 442
• Applications of Photosensors = 446
• Fiber-optic Sensors = 446
• Fibers as Light Guides = 447
• Basic Concepts of Fiber Sensors = 450
• Sensors with Movable Shutters, Gratings, or Light-carrying Elements = 450
• Reflection Sensors = 453
• Fiber-optic Pressure Sensors = 453
• Intrinsic Multimode Sensors = 454
• Temperature Sensors = 455
• Principles of Phase-modulated Sensors = 457
• Fiber-optic Gyroscopes = 459
• Single-mode-fiber polarization Sensors = 461
• Other Fiber Sensors = 462
• CHAPTER 11 MISCELLANEOUS MINIATURE SENSORS = 464
• Magnetic Sensors = 464
• Hall-effect Sensors = 464
• Magnetoresistors = 467
• Other Sensors = 469
• Soild-state Chemical Sensors = 472
• Silicon-based Sensors = 473
• Semiconducting Metal Oxide Sensors = 474
• Catalysts = 475
• Soild Electrolyte Sensors = 475
• Membranes = 475
• Other Sensors = 476
• Basic Factors of Microsensor Design = 478
• APPENDIX 1 TRANSDUCER SCHEMES = 482
• APPENDIX 2 TENSORS = 538
• REFERENCES = 545
• INDEX = 561