초정밀 측정/가공 장비의 외부진동에 대한 상대변위의 추출과 진동성능 평가에 관한 연구 = A Study on the vibrational reduction evaluation and the relative displacement in the external vibration of precision measuring system

다국어 초록 (Multilingual Abstract)

Generally, there are laser operating equipments (aligner, stepper) and electronic microscope(SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

목차 (Table of Contents)

• 1. 서론
• 2. 구조물 동특성 실험 및 해석
• 2.1. 이론적 배경
• 2.2. 초정밀 장비의 초기 상태 진동측정/분석
• 2.3. 측정방법 및 위치
• 2.4. 정밀 미진동 측정/분석 결과
• 2.5. 진동허용규제치 결정
• 2.6. 장비 및 구조물 동특성 해석 결과
• 2.7. 진동 저감 대책 설계 및 적용
• 2.8. 진동저감대책에 따른 측정/분석 결과
• 3. 진동 저감대책 前/後 결과 및 평가
• 4. 결론 및 고찰
• 후기
• 참고문헌