Nd:YAG Laser 를 이용한 자성금속 막의 패턴 식각에 있어서 에너지 흡수층이 미치는 영향 = The effect of energy-absorbing layers on micro-patterning of magnetic metal films using Nd:YAG Laser

다국어 초록 (Multilingual Abstract)

The laser patterning of sputter deposited CoNbZr/Cu/CoNbZr multi-layered films had been tried using Nd:YAG laser. However, generally it is very difficult to remove metal films because of their high reflectance of the laser on the surfaces. As a counterproposal for this problem, authors for the first time tried to deposit energy-absorbing layers on the meal films and then irradiated the laser on. the surfaces of energy absorbing layers. Here the energy-absorbing layers consisted of laser energy-absorbing fine powders and binding polymers. Three kinds of powders for the energy-absorbing layers had been used to see the difference in the pattern formation with the degree of laser energy absorption. They were electrically conductive silver powders, insulating BaTiO_(3)powder and semiconducting carbon powder. Remarkable differences in width of the formed pattern and the roughness of pattern edge were observed with the characteristic of the powder for the energy-absorbing layer. The pattern width using carbon paste was about three times larger than that using BaTiO_(3)paste. It was observed that the energy-absorbing layer with carbon was the most effective on this micro-patterning.

목차 (Table of Contents)

• 1. 서론
• 2. 실험방법
• 3. 결과 및 고찰
• 4. 결론
• 참고문헌