고정밀 장비의 진동허용규제치에 대한 시간 및 주파수 영역에서 나타나는 불일치 문제에 관한 연구 = A Study on the Mismatch of Time and Frequency Domain for Vibration Criteria of Sensitive Equipment

다국어 초록 (Multilingual Abstract)

Modern technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of 'exactness' and 'accuracy', because this is used as basic data for the design of building structure and structural dynamics of equipment. This paper deals with the properties of time and frequency domain in order to obtain more improved vibration criteria for high sensitive equipment.

목차 (Table of Contents)

• 1. 서론
• 2. 정밀장비의 진동허용규제치 특성
• 2.1 Mis-Matching Problem
• 2.2 Mis-Matching Problem의 해결 방향
• 2.3 정밀장비에 대한 적용
• 3. 결론
• 참고문헌