AlN 분말의 고에너지 밀링에 따른 소결체의 절연 특성 = Insulating Behavior of Sintered AlN Ceramics Prepared by High-Energy Bead Milling of AlN Powder

다국어 초록 (Multilingual Abstract)

Aluminum nitride (AlN) powder specimens are treated by high-energy bead milling and then sintered at various temperatures. Depending on the solvent and milling time, the oxygen content in the AlN powder varies significantly. When isopropyl alcohol is used, the oxygen content increases with the milling time. In contrast, hexane is very effective at suppressing the oxygen content increase in the AlN powder, although severe particle sedimentation after the milling process is observed in the AlN slurry. With an increase in the milling time, the primary particle size remains nearly constant, but the particle agglomeration is reduced. After spark plasma sintering at $1400^{\circ}C$, the second crystalline phase changes to compounds containing more $Al_2O_3$ when the AlN raw material with an increased milling time is used. When the sintering temperature is decreased from $1750^{\circ}C$ to $1400^{\circ}C$, the DC resistivity increases by approximately two orders of magnitude, which implies that controlling the sintering temperature is a very effective way to improve the DC resistivity of AlN ceramics.