The paper represents the results of the development and the test of “cold cathode” ion source model with 5 ㎝ aperture where the glow discharge is utilized for generation of electrons in the cathode of the ion source. The results of probe measure...
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https://www.riss.kr/link?id=A106427654
2001
English
학술저널
19-24(6쪽)
0
상세조회0
다운로드다국어 초록 (Multilingual Abstract)
The paper represents the results of the development and the test of “cold cathode” ion source model with 5 ㎝ aperture where the glow discharge is utilized for generation of electrons in the cathode of the ion source. The results of probe measure...
The paper represents the results of the development and the test of “cold cathode” ion source model with 5 ㎝ aperture where the glow discharge is utilized for generation of electrons in the cathode of the ion source. The results of probe measurements of the ion source are represented. The integral parameters such as electron energy distribution function(EEDF), electron density and mean electron energy, discharge voltage-current characteristics, and distribution of ion beam were studied.
목차 (Table of Contents)
Ion Induced Secondary Electron Emission of MgO with Patterned Gold Line Charge Neutralization
Transmission probability of the chevron baffle