실시간 폴리싱 압력 제어시스템 개발

다국어 초록 (Multilingual Abstract)

Polishing process has been applied to get extremely fine surfaces, e.g., mirror surfaces such as optical mirrors, lens, molds and etc. Nowadays not only fine surface quality but also submicron order of dimensional accuracy is required for many applications. To meet the requirements polishing process should be provided with an active control of polishing pressure especially for automation of polishing process. In this paper a study on development of an active polishing pressure control system has been presented. A new type of tool assembly has been developed to facilitate the control. The tool is attached to an axis of a polishing machine with a coil spring and control of the polishing pressure is done by the position control of the axis, which needs no additional actuator. The polishing pressure is successfully measured by the measurement of the spring deformation. Control specifications were quantitatively considered by weighting functions and a controller was designed by using loop-shaping technique based on the H<SUP>∞</SUP> synthesis. Some experiments have been executed on a polishing machine with a PC-NC controller. It is shown that the results were coincident well with the theoretical analyses and satisfied the design specifications.

참고문헌 (Reference)

1 "on Aspherical Surface Polishing of Single Crystal Silicon" JSPE 63. (63.): 1280-1284, 1997

2 "Study of Super-Smooth Polishing on Aspherical Surfaces" JSPE 61 (61): 1393-1396, 1995

3 "Development of Automatic System for Die Polishing" 17 (17): 69-79, 2000

4 "Control System Design Using MATLAB" Prentice-Hall 1993

5 "A New Fabrication Technology for Large Mirrors" 30 : 341-352, 1988