SiC nanorod has been synthesized directly on Si using CVD method. Ni was used for liquid catalyst during growth, and HMDS was used for source materials. Growth temperature and time effected grown nanorod’s diameter by growth rate. Deactivation was o...
SiC nanorod has been synthesized directly on Si using CVD method. Ni was used for liquid catalyst during growth, and HMDS was used for source materials. Growth temperature and time effected grown nanorod’s diameter by growth rate. Deactivation was occurred at high source gas concentration. From the cross-sectional SEM image, SiC nanorod growth was divided two regions because of lateral VS growth effect. SiC nanorod was grown with uniaxial direction and highly crystalline phase.